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Mechanical polishing silve sanding anodized color cusotmzied
Nov 20, 2017

Mechanical polishing silve sanding anodized


Sub micron silver lines are patterned by applying chemical mechanical polishing (CMP). Dry etched SiO2 trenches are filled with Ag by sputtering before removing surplus Ag by several CMP methods. Techniques using a slurry which focus on mechanical polishing have a problem in achieving planar removal of the metal. But with mainly chemical polishing a homogenous removal with proper embedded lines is possible. Thermally robust and smooth Ag metallization lines are the result of such a process.


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